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2022
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09
Application and fabrication process of alumina ceramics in semiconductor field
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In semiconductor equipment manufacturing, precision ceramics, as key component materials, play an important role.
Among many ceramic materials, alumina ceramics (ceramic materials with Al2O3 as the main body) have the advantages of stable material structure, high mechanical strength, high hardness, high melting point, corrosion resistance, excellent chemical stability, high resistivity, good electrical insulation performance, etc., and are widely used in semiconductor equipment.
At present, high-purity aluminum oxide (Al2O3) coating or aluminum oxide ceramics are mainly used in the chambers of plasma wafer etchers as protective materials for etching chambers and components in the chambers. Plasma etching cavity materials determine the yield, quality and stability of etching process of wafers.
In addition to the cavity, the gas nozzle of the plasma equipment, the gas distribution disk and the fixed ring for fixing the wafer also need to use alumina ceramics.
For another example, in the wafer polishing process, alumina ceramics can be widely used in polishing plates, polishing pad correction platforms, vacuum suction cups, etc.
The alumina ceramic manipulator plays a transport role in the semiconductor equipment. It is equivalent to the robot hand of the semiconductor equipment, which is responsible for carrying the silicon wafer to the designated position. Because silicon wafers are extremely vulnerable to contamination by other particles, they are generally carried out in a vacuum environment.
Both alumina ceramics and silicon carbide ceramics have the physical properties of compactness, high hardness, and high wear resistance, as well as good heat resistance, excellent mechanical strength, good insulation, good corrosion resistance, and other physical properties in high temperature environment. They are excellent materials for making semiconductor device manipulators.
In terms of material properties, silicon carbide ceramics are more suitable for making ceramic manipulators, but in terms of material price, processing difficulty and other economic aspects, alumina ceramic manipulators are more cost-effective.
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